Abstract

Process development, especially in the high-tech sectors, is an extremely complex task. The key challenge is developing a range of process recipes and testing these recipes via experimentation. For setting up the experiments usually a Design of Experiment (DoE) approach is used varying the key driving parameters, running the experiment and evaluating the manufacturing results. Today Statistical Experimental Design (SED) techniques are used to optimize the amount of necessary experiments. But there are challenges with this approach. This paper introduces a software driven development approach covering the full process development cycle. It described how the current practices of SED are extended, matured and how the resilience is improved. It highlights the gains in time and cost. Potential challenges in introducing such an approach are indicated as well.

The full paper can be downloaded here.