Abstract

With MEMS entering fast moving consumer markets the need for more ecient design concepts becomes apparent. Without a common technology platform in sight, the only feasible solution seems to be extensive modularization and re-use of existing manufacturing technology. In this paper we propose a visual approach on process modelling by presenting a software tool that supports the device engineer in specifying a set of device cross-sections that satisfy the specic requirements of thin lm manufacturing processes. The drawing tools are modeled to represent typical eects of thin-lm semiconductor fabrication techniques. Geometrical analysis algorithms ensure adherence to manufacturing constraints. The tool is currently under evaluation within the European project CORONA (CP-FP 213969-2).

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