Abstract

Product engineering for microsystems or MEMS (micro-electromechanical system) devices comprises the design of the structure as well as the definition of its manufacturing process flow. The approach is characterized by application specific fabrication flows, i.e. fabrication processes (built up by a large variety of process steps and materials) depending on the later product. Customer-tailored functions and specifications require a deep involvement of the customer throughout the complete value chain. Often the varying stages of the product engineering flow are carried out by diverse companies (or at least different departments) in different locations. In this paper we introduce a comprehensive methodology and based on that a concept for a distributed environment for customer-oriented product engineering of MEMS products. The development is currently carried out in an international EU research project.

The paper will be published on IEEE Xplore shortly.