| Semicon Europa 2009: MEMS/MST Collaborative Product Engineering for Silicon-based Fabrication Process Development |
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Abstract: The development of silicon-based MEMS/MST differs substantially from product engineering methods used in more traditional industries. The focus on manufacturing technology is a main characteristic of the MEMS/MST industry and leads to a large number of application specific fabrication processes, i.e. fabrication processes specifically developed for a product. This is often referred to as the MEMS law (“One device, one process!”). Process step configurations, process parameters and materials need to be adjusted to match the required electrical and mechanical material and device properties. The interdependencies between device design on the one hand and manufacturing process development on the other hand make MEMS/MST product engineering a rather complicated and tedious task. For more efficient development of MEMS products new design methodologies are required that incorporate the dependencies on manufacturability. |