Recurring deficiencies in process development support

Abstract

Today a variety of uncertainties and hurdles challenge new product developments or product enhancements. This is especially true when developing microelectromechanical systems (MEMS), nanoelectromechanical systems (NEMS) or nano scale thin film devices and their specifically required manufacturing processes. The diversity of technology options and their constraints as well as the shrinking geometries and other external and internal forces overwhelm the engineers and put technologies to their limit. This paper systematically investigates the different areas of external and internal factors and their influences on MEMS and NEMS process developments.

The English version of the reprinted publication in the proceedings of the COMS2008 conference can be downloaded here.