| IEEE MIXDES 2008: Tool support for microelectronic process development |
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Tool support for microelectronic process developmentAbstractThis paper investigates the practices for developing manufacturing processes in the high tech industries and specifically in the field of semiconductor thin film process technologies. For this purpose the current development practices are described, issues arising from the current practices are extracted and ways to approach these issues are highlighted. Outlines of solutions to several of these problems are provided by a software tool suite called XperiDesk. |

