Breaking through the process development barriers

Abstract

Development projects for new manufacturing recipes are challenged by a variety of different external and internal requirements and constraints. This is especially true when developing microelectromechanical systems (MEMS), nanoelectromechanical systems (NEMS) or nano scale thin film devices and their specifically required manufacturing processes. The diversity of technology options and their constraints as well as the shrinking geometries and other external and internal forces put the engineers and technologies to their limit. To break through these barriers of growing complexity in fabrication process development a new approach for adequate process design automation is necessary. This approach needs to cover the design of new process sequences from the very first idea to the final handover to mass production. It must also offer new ground breaking solutions for the electronic transfer of process data and knowledge to technology partners.

The English version of the reprinted publication in the proceedings of the COMS2008 conference can be downloaded here.