What would it mean to you if all your process engineers could perform virtual prototyping before running experiments in your fab? And what if your process engineers could do that at the push of a button?.

XperiSim’s generic simulation and calculation interface together with the management of simulation and calculation modes achieves exactly that. Simulation experts define the models or how a certain process step can be simulated or calculated using a specific tool. Then process engineers can simply select the appropriate simulation tool and XperiSim builds the necessary simulator or calculator input without any additional programming.

The XperiSim module of the XperiDesk suite has an open interface to accommodate external simulation and calculation software. Additionally the interface for the Java Interpreter allows for complex parameter calculations. Models for different simulators and various levels of abstraction, whether geometric, empirical, or physical, can be attached to each process step or process step group. Input decks for simulation tools are generated by a button click and the output from the simulation is automatically loaded into the system. No manual editing is necessary.

What’s about Design of Experiment (DoE) and verification via simulation? The XperiSim module allows the process engineers to define the parameters to vary in which interval change the settings and this way create a full factorial DoE tree. Pruning subtrees can be performed and then all remaining configurations of the tree can be simulated or calculated.