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CMM online: Process Relations Makes its XperiDesk Suite Available as a Software Service |
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Improved and streamlined collaboration and exchange capabilities target thin-film MEMS and nano materials sectors, among others. more>>
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IEEE: Micro and nano product engineering using data management for silicon-based fabrication process development |
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Product engineering of micro and nano technology (MNT) devices differs substantially from product engineering in more traditional industries. The general approach is mostly bottom up, as it centers around the available fabrication techniques. more>> |
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Research Article: Process development support environment - a tool suite to engineer manufacturing sequences |
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This paper investigates the practices for developing manufacturing processes in the high tech industries and specifically in the field of MEMS based on semiconductor thin film process technologies. more >> |